Amag Consulting, LLC

Purpose: in This Phase Ii Project, Amag Consulting Aims to Address a Critical Gap in Commercially Available Beam Simulation Capability. by Simulating Electron Beam/solid Interactions, Scanning Electron Microscope (SEM) Images, and Electron Trajectories, Amag's Enhanced Technology Proposes to Help Semiconductor Companies Understand the Structure and Metrology of Manufactured Nanoscale Devices, and Qualify Metrology Processes for Next Generation Chips That Are Smaller and More Energy Efficient.activities to Be Performed: During Its Phase Ii Project, Amag Will Image Structures Which Exhibit Charging (such as Silicon Dioxide Lines on a Silicon Substrate), and Compare Them to Its Simusem Results. the Comparison Will Be Used to Refine Their Simusem Charging Model. in Addition, Amag Proposes to Add Magnetic Field and Roughness Effects to the Simulation to More Accurately Produce Realistic Images.expected Outcomes: by Simulating Electron Beam/solid Interactions, Scanning Electron Microscope (SEM) Images, and Electron Trajectories, Amag's Enhanced Technology Proposes to Help Semiconductor Companies Understand the Structure and Metrology of Manufactured Nanoscale Devices, and Qualify Metrology Processes for Next Generation Chips That Are Smaller and More Energy Efficient.intended Beneficiaries: Semiconductor Industrysubrecipient Activities: Binghamton University Staff Member Will Provide Assistance With Analysis and Comparison of Simulated Images.