Federal grant · cooperative agreement (b)
Purpose: Octave Photonics Seeks to Develop a New Measurement Tool for Critical Metrology in the Semiconductor Fabrication That Can Analyze Airborne Contaminants and Toxic Gases Inside and Outside the Fab That Lead to Semiconductor Processing Defects and Safety Infringements. Activities to Be Performed: the Awardee Will Design a Photonic Integrated Circuit, Measure Baseline Performance, and Integrate Their Module Within a Commercial Sensing System. Expected Outcomes: the Infrared Spectrometer System, Integrated Into a Larger Commercial Instrument, Will Improve Wafer Yields, Improve Chip Performance, and Ensure Long-term Environmental Sustainability for Fabs. Intended Beneficiaries: U.s. Fabrication Facilities. Subrecipient Activities: the Recipient Plans to Subaward Funds to Integrate Their New System Within the Subrecipient's Commercial Instrument.
Committed
$504,014
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The cash actually disbursed against this award. The gap from committed is the disbursement pipeline: promised, not yet cashed.
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